Ultra High Solid Angle EDS System Advanced STEM Analysis for FE-SEM
نویسندگان
چکیده
EDS (Energy dispersive X-ray spectrometry) is a technique used for elemental analysis of a sample, through detection of characteristic X-rays generated from a sample impacted by an electron beam. STEM (Scanning Transmission Electron Microscopy) is a method to obtain high spatial resolution images with Z-contrast [1]. STEM-in-SEM has recently become a technique of choice for high spatial resolution imaging in SEM of ultra-thin specimens and can be combined with the EDS for compositional analysis of nanostructures, with the ability to resolve structures previously unattainable with bulk EDS analysis.
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